Diaphragm Resonator (5 Layers)
1. Global Geometry
Radius (um)
Layer 0:
Si Substrate
Thick (um)
E (GPa)
Stress (MPa)
nu
Density
Layer 1:
SiO2 (Wet Oxidation)
Thick (nm)
E (GPa)
Stress (MPa)
nu
Density
Layer 2:
Molybdenum (Sputtered)
Thick (nm)
E (GPa)
Stress (MPa)
nu
Density
Layer 3:
AlN (Sputtered)
Thick (nm)
E (GPa)
Stress (MPa)
nu
Density
Layer 4:
Molybdenum (Sputtered)
Thick (nm)
E (GPa)
Stress (MPa)
nu
Density
CALCULATE
Fundamental Frequency (f01):
-- kHz